Invention Grant
- Patent Title: Method for fabricating Cu—In—Ga—Se film solar cell
- Patent Title (中): 制备Cu-In-Ga-Se薄膜太阳能电池的方法
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Application No.: US14153028Application Date: 2014-01-11
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Publication No.: US09105801B2Publication Date: 2015-08-11
- Inventor: Liuyu Lin , Zhun Zhang
- Applicant: Liuyu Lin , Zhun Zhang
- Main IPC: H01L31/18
- IPC: H01L31/18 ; C23C14/34 ; C23C14/56 ; H01L31/032 ; H01L21/02 ; C23C14/06 ; C23C14/58

Abstract:
A method for fabricating a Cu—In—Ga—Se film solar cell is provided. The method comprises: a) fabricating a molybdenum back electrode on a substrate; b) fabricating a Cu—In—Ga—Se absorbing layer on the back electrode by fractional sputtering in a plurality of sputter chambers; c) performing an annealing; d) fabricating an In2Se3 or ZnS buffer layer on the Cu—In—Ga—Se absorbing layer; e) fabricating an intrinsic zinc oxide high impedance layer on the In2Se3 or ZnS buffer layer; f) fabricating an indium tin oxide film low impedance layer on the intrinsic zinc oxide high impedance layer; g) fabricating an aluminum electrode on the indium tin oxide film low impedance layer.
Public/Granted literature
- US20140193943A1 METHOD FOR FABRICATING Cu-In-Ga-Se FILM SOLAR CELL Public/Granted day:2014-07-10
Information query
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