Invention Grant
- Patent Title: Method for forming a patterned layer on a substrate
- Patent Title (中): 在基板上形成图案层的方法
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Application No.: US12666838Application Date: 2008-06-30
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Publication No.: US09105867B2Publication Date: 2015-08-11
- Inventor: Marcus Antonius Verschuuren , Herbert Lifka , Cristina Tanase
- Applicant: Marcus Antonius Verschuuren , Herbert Lifka , Cristina Tanase
- Applicant Address: NL Eindhoven
- Assignee: KONINKLIJKE PHILIPS N.V.
- Current Assignee: KONINKLIJKE PHILIPS N.V.
- Current Assignee Address: NL Eindhoven
- Agent Yuliya Mathis
- Priority: EP07111734 20070704; EP07116650 20070918
- International Application: PCT/IB2008/052612 WO 20080630
- International Announcement: WO2009/004560 WO 20090108
- Main IPC: B05D5/12
- IPC: B05D5/12 ; H01L51/52 ; H01L51/56 ; H01L27/30 ; H01L51/00

Abstract:
This invention relates to a method for forming a patterned layer on a substrate by means of an imprint process. According to the method a first layer is provided on the substrate, and a pattern of recesses is provided in the first layer by imprinting the layer with a patterning means. Then the first layer is cured. The curing is followed by performing a first surface treatment onto the first layer to make the surface of thereof hydrophilic, and then performing a second surface treatment onto a selected subarea of the surface of the first layer to make the. subarea hydrophobic. The subarea includes surface portions between the recesses and excludes the recesses. Finally, a conducting pattern material (41) is deposited into the recesses.
Public/Granted literature
- US20100203235A1 METHOD FOR FORMING A PATTERNED LAYER ON A SUBSTRATE Public/Granted day:2010-08-12
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