Invention Grant
US09108296B2 Substrate processing apparatus and method of operating the same 有权
基板处理装置及其操作方法

Substrate processing apparatus and method of operating the same
Abstract:
Provided is a substrate processing apparatus including a first conduit configured to supply a processing solution to a substrate loaded on a supporter, and a second conduit in fluid communication with the first conduit, the second conduit configured to supply a gas to the first conduit to be mixed with the processing solution, wherein the first conduit includes an opening to permit the processing solution mixed with the gas to be injected onto the substrate.
Public/Granted literature
Information query
Patent Agency Ranking
0/0