Invention Grant
- Patent Title: Substrate processing apparatus and method of operating the same
- Patent Title (中): 基板处理装置及其操作方法
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Application No.: US13137555Application Date: 2011-08-25
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Publication No.: US09108296B2Publication Date: 2015-08-18
- Inventor: Jong Kwang Whang , Sung Gyu Kim
- Applicant: Jong Kwang Whang , Sung Gyu Kim
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2011-0042698 20110504
- Main IPC: B24C7/00
- IPC: B24C7/00 ; B24C1/04 ; B24C3/04

Abstract:
Provided is a substrate processing apparatus including a first conduit configured to supply a processing solution to a substrate loaded on a supporter, and a second conduit in fluid communication with the first conduit, the second conduit configured to supply a gas to the first conduit to be mixed with the processing solution, wherein the first conduit includes an opening to permit the processing solution mixed with the gas to be injected onto the substrate.
Public/Granted literature
- US20120282845A1 Substrate processing apparatus and method of operating the same Public/Granted day:2012-11-08
Information query