Invention Grant
- Patent Title: Method of deposition
- Patent Title (中): 沉积方法
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Application No.: US13609913Application Date: 2012-09-11
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Publication No.: US09109282B2Publication Date: 2015-08-18
- Inventor: Shoso Nishida
- Applicant: Shoso Nishida
- Applicant Address: JP Tokyo
- Assignee: THE JAPAN STEEL WORKS, LTD.
- Current Assignee: THE JAPAN STEEL WORKS, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2011-198043 20110912
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/50 ; H01J37/20

Abstract:
A method of deposition is provided in which a deposition operation can be immediately performed when a workpiece for deposition is carried into a deposition chamber irrespective of a shape or a structure of the workpiece for deposition. The workpiece for deposition is integrally molded with an assisting member, which is configured to maintain the workpiece for deposition in a predetermined orientation such that a deposition surface or a deposition portion thereof faces a target material when the workpiece for deposition is carried into a deposition chamber and is placed on a deposition stand, when the workpiece for deposition is injection-molded; and the workpiece for deposition is carried into the deposition chamber and is deposited.
Public/Granted literature
- US20130062194A1 METHOD OF DEPOSITION Public/Granted day:2013-03-14
Information query
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