Invention Grant
- Patent Title: Micro-gyroscope and method for operating a micro-gyroscope
- Patent Title (中): 微陀螺仪和微陀螺仪操作方法
-
Application No.: US13720262Application Date: 2012-12-19
-
Publication No.: US09109893B2Publication Date: 2015-08-18
- Inventor: Martin Heller
- Applicant: Maxim Integrated Products, Inc.
- Applicant Address: US CA San Jose
- Assignee: Maxim Integrated Products, Inc.
- Current Assignee: Maxim Integrated Products, Inc.
- Current Assignee Address: US CA San Jose
- Agency: North Weber & Baugh LLP
- Priority: DE102011057032 20111223
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5747 ; G01C19/5762

Abstract:
A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring.
Public/Granted literature
- US20130160545A1 MICRO-GYROSCOPE AND METHOD FOR OPERATING A MICRO-GYROSCOPE Public/Granted day:2013-06-27
Information query