Invention Grant
US09109958B2 Multi-chamber heat treatment device and temperature control method 有权
多室热处理装置及温度控制方法

Multi-chamber heat treatment device and temperature control method
Abstract:
The multi-chamber heat treatment device includes a temperature sensor (31) attached to an object to be treated (X), a signal transmission unit (30) which transmits a detected signal from the temperature sensor to the outside of a heating chamber and a cooling chamber, and a temperature measuring unit (40) which is arranged outside the heating chamber and the cooling chamber to measure the temperature of the object from the detected signal of the temperature sensor transmitted from the signal transmission unit (30).
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