Invention Grant
US09110388B2 Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related method 有权
具有多组压电元件的投影曝光装置可以在不同方向上移动并进行相关的方法

Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related method
Abstract:
The disclosure relates to a projection exposure apparatus and an optical system, such as a projection objective or an illumination system in a projection exposure apparatus for microlithography, that includes at least one optical element and at least one manipulator having a drive device for the optical element. The drive device can have at least one movable partial element and at least one stationary partial element movable relative to one another in at least one direction of movement.
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