Invention Grant
US09110388B2 Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related method
有权
具有多组压电元件的投影曝光装置可以在不同方向上移动并进行相关的方法
- Patent Title: Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related method
- Patent Title (中): 具有多组压电元件的投影曝光装置可以在不同方向上移动并进行相关的方法
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Application No.: US13589313Application Date: 2012-08-20
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Publication No.: US09110388B2Publication Date: 2015-08-18
- Inventor: Sascha Bleidistel , Bernhard Geuppert
- Applicant: Sascha Bleidistel , Bernhard Geuppert
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006039821 20060825
- Main IPC: G02B7/02
- IPC: G02B7/02 ; G03F7/20 ; H01L41/09 ; H02N2/00 ; H02N2/02

Abstract:
The disclosure relates to a projection exposure apparatus and an optical system, such as a projection objective or an illumination system in a projection exposure apparatus for microlithography, that includes at least one optical element and at least one manipulator having a drive device for the optical element. The drive device can have at least one movable partial element and at least one stationary partial element movable relative to one another in at least one direction of movement.
Public/Granted literature
- US20120320353A1 PROJECTION EXPOSURE APPARATUS AND OPTICAL SYSTEM Public/Granted day:2012-12-20
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |