Invention Grant
US09111879B2 Semiconductor processing methods, and methods for forming silicon dioxide
有权
半导体加工方法以及形成二氧化硅的方法
- Patent Title: Semiconductor processing methods, and methods for forming silicon dioxide
- Patent Title (中): 半导体加工方法以及形成二氧化硅的方法
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Application No.: US13176438Application Date: 2011-07-05
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Publication No.: US09111879B2Publication Date: 2015-08-18
- Inventor: Shyam Surthi
- Applicant: Shyam Surthi
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L21/316 ; C23C16/40 ; C23C16/455 ; C23C16/46 ; H01L21/02 ; H01L21/314

Abstract:
Some embodiments include methods for semiconductor processing. A semiconductor substrate may be placed within a reaction chamber. The semiconductor substrate may have an inner region and an outer region laterally outward of said inner region, and may have a deposition surface that extends across the inner and outer regions. The semiconductor substrate may be heated by radiating thermal energy from the outer region to the inner region. The heating may eventually achieve thermal equilibrium. However, before thermal equilibrium of the outer and inner regions is reached, and while the outer region is warmer than the inner region, at least two reactants are sequentially introduced into the reaction chamber. The reactants may together form a single composition on the deposition surface through a quasi-ALD process.
Public/Granted literature
- US20110263135A1 Semiconductor Processing Methods, And Methods For Forming Silicon Dioxide Public/Granted day:2011-10-27
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