Invention Grant
- Patent Title: Transfer system
- Patent Title (中): 转移系统
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Application No.: US13661039Application Date: 2012-10-26
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Publication No.: US09111976B2Publication Date: 2015-08-18
- Inventor: Yoshiki Kimura , Takashi Minami
- Applicant: KABUSHIKI KAISHA YASKAWA DENKI
- Applicant Address: JP Kitakyushu-Shi
- Assignee: KABUSHIKI KAISHA YASKAWA DENKI
- Current Assignee: KABUSHIKI KAISHA YASKAWA DENKI
- Current Assignee Address: JP Kitakyushu-Shi
- Agency: Mori & Ward, LLP
- Priority: JP2012-000828 20120105
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; H01L21/687
Abstract:
A transfer system according to an embodiment includes a plurality of robot hands, a storage unit, and an instructing part. The robot hands are operable to hold a thin sheet-like workpiece. The storage unit stores therein speed information that represents a temperature of the workpiece associated with a specified speed of a robot hand that holds the workpiece. The instructing part extracts the specified speed for each robot hand from the speed information and instructs to move all of the robot hands at or lower than a representative speed determined based on a set of extracted specified speed data.
Public/Granted literature
- US20130178979A1 TRANSFER SYSTEM Public/Granted day:2013-07-11
Information query
IPC分类:
