Methods for forming a layer of semiconductor material are provided. A substrate is provided. An amorphous layer is formed over the substrate, where the amorphous layer includes a semiconductor or a semiconductor alloy. A seed wafer is bonded to the amorphous layer, where the seed wafer includes a crystalline semiconductor structure. A solid-phase epitaxial (SPE) growth process is performed to crystallize the amorphous layer, where the SPE growth process uses the crystalline semiconductor structure of the seed wafer as a crystal template. The seed wafer is debonded from the structure.