Invention Grant
US09112040B2 Amorphous oxide thin film transistor, method for manufacturing the same, and display panel
有权
无定形氧化物薄膜晶体管,其制造方法和显示面板
- Patent Title: Amorphous oxide thin film transistor, method for manufacturing the same, and display panel
- Patent Title (中): 无定形氧化物薄膜晶体管,其制造方法和显示面板
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Application No.: US13428422Application Date: 2012-03-23
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Publication No.: US09112040B2Publication Date: 2015-08-18
- Inventor: Xiaodi Liu , Li Sun , Haijing Chen
- Applicant: Xiaodi Liu , Li Sun , Haijing Chen
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Ladas & Parry LLP
- Priority: CN201110076083 20110328
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66

Abstract:
Embodiments of the disclosed technology provide an amorphous oxide thin film transistor (TFT), a method for preparing an amorphous oxide TFT, and a display panel. The amorphous oxide thin film transistor includes: a gate electrode, a gate insulating layer, a semiconductor active layer, a source electrode and a drain electrode. The semiconductor active layer comprises a channel layer and an ohmic contact layer, and the channel layer has a greater content of oxygen than the ohmic contact layer; the channel layer contacts the gate insulating layer, and the ohmic contact layer comprises two separated ohmic contact regions, one of which contacts the source electrode and the other of which contacts the drain electrode.
Public/Granted literature
- US20120248446A1 AMORPHOUS OXIDE THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING THE SAME, AND DISPLAY PANEL Public/Granted day:2012-10-04
Information query
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