Invention Grant
US09117616B2 Dielectric barrier discharge-type electrode structure for generating plasma having conductive body protrusion on electrodes 有权
用于产生具有导电体突出在电极上的等离子体的介电阻挡放电型电极结构

  • Patent Title: Dielectric barrier discharge-type electrode structure for generating plasma having conductive body protrusion on electrodes
  • Patent Title (中): 用于产生具有导电体突出在电极上的等离子体的介电阻挡放电型电极结构
  • Application No.: US14414517
    Application Date: 2013-06-27
  • Publication No.: US09117616B2
    Publication Date: 2015-08-25
  • Inventor: Hee Sik Sohn
  • Applicant: SP TECH CO., LTD.
  • Applicant Address: KR Gyeonggi-do
  • Assignee: SP TECH CO., LTD.
  • Current Assignee: SP TECH CO., LTD.
  • Current Assignee Address: KR Gyeonggi-do
  • Agency: Barnes & Thornburg LLP
  • Priority: KR10-2012-0076391 20120713
  • International Application: PCT/KR2013/005706 WO 20130627
  • International Announcement: WO2014/010851 WO 20140116
  • Main IPC: H01J1/88
  • IPC: H01J1/88 H01J19/42 H05H1/24 H01J1/02 A61L9/22 A61L2/14
Dielectric barrier discharge-type electrode structure for generating plasma having conductive body protrusion on electrodes
Abstract:
Provided is a dielectric barrier discharge-type electrode structure for generating plasma. The electrode structure, according to the present invention, comprises: an upper conductive body electrode and a lower conductive body electrode; at least one conductive body electrode protrusion portion, which is formed on at least one surface of the upper conductive body electrode and/or the lower conductive body electrode; a dielectric layer which is formed on at least one of the inner surfaces of the upper conductive body electrode and the lower conductive body electrode that face each other, so as to have a substantially uniform thickness; and a specific gap (d) which is formed between the upper and lower conductive body electrodes and the dielectric layer, or between dielectric layers, due to the protruding effect of the conductive body electrode protrusion portion when the upper conductive body electrode and the lower conductive body electrodes come into close contact, wherein the plasma is generated by applying a pulse power or an alternating power to the upper conductive body electrode and the lower conductive body electrode.
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