Invention Grant
- Patent Title: Demodulation pixel with backside illumination and charge barrier
- Patent Title (中): 具有背面照明和电荷屏障的解调像素
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Application No.: US12843583Application Date: 2010-07-26
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Publication No.: US09117712B1Publication Date: 2015-08-25
- Inventor: Thierry Oggier , Michael Lehmann
- Applicant: Thierry Oggier , Michael Lehmann
- Applicant Address: CH Zurich
- Assignee: MESA Imaging AG
- Current Assignee: MESA Imaging AG
- Current Assignee Address: CH Zurich
- Agency: Fish & Richardson P.C.
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L31/00 ; H01J40/14 ; H01L27/146

Abstract:
A high-speed, high-sensitivity demodulation sensor usable for e.g. time-of-flight application uses a back side illuminated (BSI) image sensor chip, in which the photo-generated charges are first transferred to a demodulation area, from which the charges are then sampled and stored on at least one specific storage node. The storage node is electrically isolated from the sensitive area. Such a pixel might find its use specifically in 3D time-of-flight imaging given its improvements in sensitivity because the presented invention allows to design pixel with up to 100% fill factor and enables charge detection even if the charge generation by the photon occurs deep in the silicon substrate.
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