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US09117851B2 Semiconductor device comprising a graphene wire 有权
包括石墨烯线的半导体器件

Semiconductor device comprising a graphene wire
Abstract:
According to one embodiment, a semiconductor device includes a catalyst underlying layer formed on a substrate including semiconductor elements formed thereon and processed in a wiring pattern, a catalyst metal layer that is formed on the catalyst underlying layer and whose width is narrower than that of the catalyst underlying layer, and a graphene layer growing with a sidewall of the catalyst metal layer set as a growth origin and formed to surround the catalyst metal layer.
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