Invention Grant
- Patent Title: Substrate loader and unloader having an air bearing support
- Patent Title (中): 底板装载机和卸载机具有空气轴承支撑
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Application No.: US13279414Application Date: 2011-10-24
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Publication No.: US09117856B2Publication Date: 2015-08-25
- Inventor: Daniel Goodman , Arthur Keigler , Freeman Fisher
- Applicant: Daniel Goodman , Arthur Keigler , Freeman Fisher
- Applicant Address: US MA Billerica
- Assignee: TEL NEXX, INC.
- Current Assignee: TEL NEXX, INC.
- Current Assignee Address: US MA Billerica
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Main IPC: A47J45/00
- IPC: A47J45/00 ; H01L21/67 ; H01L21/683 ; H01L21/687
Abstract:
A substrate separation chuck which is adapted to separate a substrate from an adhering surface. The substrate separation chuck has a support adapted to support the adhering surface. An air bearing surface is adapted to support the substrate, the air bearing surface axially moveable relative to the support. The air bearing surface has a first position adjacent the substrate with the substrate coupled to the adhering surface. The air bearing surface is moveable from the first position to a second position separating the substrate from the adhering surface without contact between the substrate and the air bearing surface.
Public/Granted literature
- US20130009415A1 SUBSTRATE LOADER AND UNLOADER HAVING AN AIR BEARING SUPPORT Public/Granted day:2013-01-10
Information query
