Invention Grant
- Patent Title: Electro-acoustic transducer and method of manufacturing the same
- Patent Title (中): 电声换能器及其制造方法
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Application No.: US13401324Application Date: 2012-02-21
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Publication No.: US09120126B2Publication Date: 2015-09-01
- Inventor: Seog-woo Hong
- Applicant: Seog-woo Hong
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2011-0084058 20110823
- Main IPC: H01L41/00
- IPC: H01L41/00 ; B06B1/02 ; H01L41/047 ; H01L23/48 ; H01L23/00

Abstract:
Electro-acoustic transducers and methods of manufacturing the electro-acoustic transducer are provided. An electro-acoustic transducer includes: a first wafer including a first substrate in which a plurality of electro-acoustic transducer cells are formed; and a second wafer disposed in a lower portion of the first wafer, and including a second substrate in which a plurality of through wafer vias are formed. A method of manufacturing an electro-acoustic transducer includes: forming a plurality of electro-acoustic transducer cells in a first substrate of a first wafer; forming a plurality of through wafer vias in a second substrate of a second wafer; and bonding the first and second wafers to each other.
Public/Granted literature
- US20130051179A1 ELECTRO-ACOUSTIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-02-28
Information query
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