Invention Grant
- Patent Title: Singulation of layered materials using selectively variable laser output
- Patent Title (中): 使用选择性可变的激光输出分层材料
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Application No.: US13234795Application Date: 2011-09-16
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Publication No.: US09120181B2Publication Date: 2015-09-01
- Inventor: Ramanujapuram A. Srinivas , Michael Greenberg , David Gaudiosi , Michael Mielke , Tim Booth
- Applicant: Ramanujapuram A. Srinivas , Michael Greenberg , David Gaudiosi , Michael Mielke , Tim Booth
- Applicant Address: US CA Santa Clara
- Assignee: COHERENT, INC.
- Current Assignee: COHERENT, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Morrison & Foerster LLP
- Main IPC: B23K26/40
- IPC: B23K26/40 ; B23K26/36

Abstract:
Systems and methods for processing, selectively ablating, and singulating layered materials. According to some embodiments, methods for selectively ablating a layered material may include selectively varying a wavelength of at least a portion of a primary ultrafast laser beam to create a secondary ultrafast laser beam with a second wavelength, the primary ultrafast laser beam being configured to ablate a layer of the layered material, the secondary ultrafast laser beam being configured to ablate an additional layer of the layered material and applying the first and second ultrafast laser beams to the layered material to create a singulated product.
Public/Granted literature
- US20120152915A1 SINGULATION OF LAYERED MATERIALS USING SELECTIVELY VARIABLE LASER OUTPUT Public/Granted day:2012-06-21
Information query
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