Invention Grant
- Patent Title: Polishing liquid composition
- Patent Title (中): 抛光液组成
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Application No.: US13314397Application Date: 2011-12-08
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Publication No.: US09120199B2Publication Date: 2015-09-01
- Inventor: Taiki Yoshino
- Applicant: Taiki Yoshino
- Applicant Address: JP Tokyo
- Assignee: Kao Corporation
- Current Assignee: Kao Corporation
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2010-274767 20101209; JP2011-204409 20110920
- Main IPC: B24B37/04
- IPC: B24B37/04 ; C09G1/02 ; C09K3/14 ; C09K13/06

Abstract:
A polishing liquid composition that makes it possible to provide a polished substrate surface on which scratches and/or waviness are reduced, without impairing productivity, is provided, and further, a method for manufacturing and polishing a substrate using this polishing liquid composition is provided. The polishing liquid composition contains an abrasive, a water-soluble polymer, and water, wherein the water-soluble polymer has a sulfonic acid group, and has an aromatic ring in each of a main chain and a side chain. The method for manufacturing a substrate, and the method for polishing a substrate, include performing polishing by supplying the above-described polishing liquid composition to a surface to be polished of a substrate to be polished, bringing a polishing pad into contact with the surface to be polished, and moving the polishing pad and/or the substrate to be polished.
Public/Granted literature
- US20120077422A1 POLISHING LIQUID COMPOSITION Public/Granted day:2012-03-29
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