Invention Grant
US09120708B2 Process for preparing ceramics, ceramics thus obtained and uses thereof, especially as a sputtering target 有权
制备陶瓷的方法,由此获得的陶瓷及其用途,特别是溅射靶

Process for preparing ceramics, ceramics thus obtained and uses thereof, especially as a sputtering target
Abstract:
Process for preparing a ceramic from an inorganic base material that is in the form of a powder having a high melting point, comprising a step of mixing the powder of the inorganic base material with a second inorganic component also in powder form and which acts as a dopant for the inorganic base material. The dopant is constituted by a single inorganic material or by a mixture of at least two inorganic materials having a dopant effect on the inorganic base material. The process comprises a sintering step carried out at a high temperature. The ceramics obtained, because of their high density, are advantageously used as a target element. Films and electrodes obtained from these ceramics exhibit particularly advantageous properties.
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