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US09122085B2 Thermally controlled semiconductor optical waveguide 有权
热控半导体光波导

Thermally controlled semiconductor optical waveguide
Abstract:
An apparatus includes a conductive or semiconductive substrate and a dielectric layer located directly thereon. A semiconductor layer is located directly on the dielectric layer. The semiconductor layer includes a ridge waveguide and a heater strip extending parallel to the ridge waveguide. The heater strip is electrically isolated from the ridge waveguide and is doped to carry a current therein about parallel to the ridge waveguide.
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