Invention Grant
- Patent Title: Master template replication
- Patent Title (中): 主模板复制
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Application No.: US12607564Application Date: 2009-10-28
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Publication No.: US09122148B2Publication Date: 2015-09-01
- Inventor: Michael N. Miller , Cynthia B. Brooks , Laura Anne Brown , Gerard M. Schmid
- Applicant: Michael N. Miller , Cynthia B. Brooks , Laura Anne Brown , Gerard M. Schmid
- Applicant Address: US TX Austin US TX Austin
- Assignee: Canon Nanotechnologies, Inc.,Molecular Imprints, Inc.
- Current Assignee: Canon Nanotechnologies, Inc.,Molecular Imprints, Inc.
- Current Assignee Address: US TX Austin US TX Austin
- Agent Cameron A. King
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B82Y10/00 ; B82Y40/00 ; G11B5/855
Abstract:
Systems and methods for providing multiple replicas from a master template are described. Replicas may be formed having a mesa. In one embodiment, a dummy fill region may be included on master template and/or replicas.
Public/Granted literature
- US20100109194A1 Master Template Replication Public/Granted day:2010-05-06
Information query
