Invention Grant
- Patent Title: Patterning process and resist composition
- Patent Title (中): 图案化过程和抗蚀剂组成
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Application No.: US13920133Application Date: 2013-06-18
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Publication No.: US09122152B2Publication Date: 2015-09-01
- Inventor: Jun Hatakeyama , Tomohiro Kobayashi , Kenji Funatsu
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICALS CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICALS CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2012-153256 20120709
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/38

Abstract:
A negative pattern is formed by coating a resist composition comprising a branched polymer having chains extending in at least three directions and an optional acid generator onto a substrate, prebaking, exposing to high-energy radiation, baking, and developing in an organic solvent developer so that the unexposed region of resist film is dissolved away and the exposed region of resist film is not dissolved. The resist composition exhibits a high dissolution contrast and no swell during organic solvent development, and forms a pattern without collapse and bridging defects.
Public/Granted literature
- US20140011136A1 PATTERNING PROCESS AND RESIST COMPOSITION Public/Granted day:2014-01-09
Information query
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