Invention Grant
US09122160B2 Method and apparatus for performing optical proximity and photomask correction
有权
用于执行光学接近和光掩模校正的方法和装置
- Patent Title: Method and apparatus for performing optical proximity and photomask correction
- Patent Title (中): 用于执行光学接近和光掩模校正的方法和装置
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Application No.: US13832557Application Date: 2013-03-15
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Publication No.: US09122160B2Publication Date: 2015-09-01
- Inventor: Gek Soon Chua , Yi Zou , Wei-Long Wang , Byoung Il Choi
- Applicant: Gek Soon Chua , Yi Zou , Wei-Long Wang , Byoung Il Choi
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/00

Abstract:
An approach is provided for enabling simulation of photomask contour shapes, performing verification on the simulated photomask shapes, and correcting errors in OPC correction or bad fracturing methods to perform photomask proximity correction in real time before physically writing of the photomask. Embodiments include performing optical proximity correction of a photomask of a semiconductor layout to generate a corrected photomask, simulating the corrected photomask to generate one or more simulated contour shapes within a simulated photomask, verifying the simulated contour shapes to determine errors associated with the simulated photomask, and correcting the errors in the simulated contour shapes of the simulated photomask to generate a final photomask.
Public/Granted literature
- US20140282299A1 METHOD AND APPARATUS FOR PERFORMING OPTICAL PROXIMITY AND PHOTOMASK CORRECTION Public/Granted day:2014-09-18
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