Invention Grant
- Patent Title: Method of patterning a device
- Patent Title (中): 图案化装置的方法
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Application No.: US14274816Application Date: 2014-05-12
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Publication No.: US09122167B2Publication Date: 2015-09-01
- Inventor: John Andrew Defranco , Francis Houlihan , Charles Warren Wright , Diane Carol Freeman , Frank Xavier Byrne , Douglas Robert Robello , Sandra Rubsam , Terrence Robert O'Toole
- Applicant: ORTHOGONAL, INC.
- Applicant Address: US NY Rochester
- Assignee: Orthogonal, Inc.
- Current Assignee: Orthogonal, Inc.
- Current Assignee Address: US NY Rochester
- Agency: Merchant & Gould P.C.
- Main IPC: G03F7/26
- IPC: G03F7/26 ; G03F7/42 ; G03F7/004 ; G03F7/039 ; G03F7/32

Abstract:
A photopolymer layer is formed on an organic device substrate and exposed to patterned radiation. The photopolymer layer includes a photopolymer comprising at least a first repeating unit having an acid-catalyzed, solubility-altering reactive group, wherein the total fluorine content of the photopolymer is less than 30% by weight. The pattern exposed photopolymer is contacted with a developing agent, such as a developing solution, to remove unexposed photopolymer, thereby forming a developed structure having a first pattern of exposed photopolymer covering the substrate and a complementary second pattern of uncovered substrate corresponding to the unexposed photopolymer. The developing agent comprises at least 50% by volume of a hydrofluoroether developing solvent.
Public/Granted literature
- US20140248565A1 METHOD OF PATTERNING A DEVICE Public/Granted day:2014-09-04
Information query
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