Invention Grant
- Patent Title: Exposure apparatus
- Patent Title (中): 曝光装置
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Application No.: US13483751Application Date: 2012-05-30
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Publication No.: US09122171B2Publication Date: 2015-09-01
- Inventor: Michinobu Mizumura , Kazushige Hashimoto , Makoto Hatanaka
- Applicant: Michinobu Mizumura , Kazushige Hashimoto , Makoto Hatanaka
- Applicant Address: JP Yokohama-shi
- Assignee: V TECHNOLOGY CO., LTD.
- Current Assignee: V TECHNOLOGY CO., LTD.
- Current Assignee Address: JP Yokohama-shi
- Agency: Foley & Lardner LLP
- Priority: JP2009-275455 20091203
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/42 ; G03F7/20

Abstract:
Exposure apparatus includes photomasks on which a mask pattern having the same shape as that of an exposure pattern exposed onto a surface of a TFT substrate held on a stage is formed, lens assemblies in which unit lens groups in each of which a plurality of convex lenses are arranged in a normal direction to the photomasks so that same-size erect images of mask patterns formed on the photomasks can be formed on the surface of the TFT substrate are arranged in a plane parallel with the photomasks and the surface of the TFT substrate held on the stage, and moving device that moves the lens assemblies in a plane parallel with the masks and the surface of TFT substrate held on the stage.
Public/Granted literature
- US20120236283A1 EXPOSURE APPARATUS Public/Granted day:2012-09-20
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