Invention Grant
- Patent Title: Oxide sputtering target and protective film for optical recording medium
- Patent Title (中): 氧化物溅射靶和光记录介质保护膜
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Application No.: US14375319Application Date: 2013-02-06
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Publication No.: US09123360B2Publication Date: 2015-09-01
- Inventor: Atsushi Saito , Rie Mori
- Applicant: MITSUBISHI MATERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Locke Lord LLP
- Priority: JP2012-023397 20120206; JP2013-010035 20130123
- International Application: PCT/JP2013/052679 WO 20130206
- International Announcement: WO2013/118748 WO 20130815
- Main IPC: B32B3/02
- IPC: B32B3/02 ; G11B7/254 ; C04B35/453 ; G11B7/257 ; C04B35/645 ; G11B7/26 ; C23C14/08 ; C23C14/34 ; H01J37/34

Abstract:
The present invention relates to an oxide sputtering target. By using the oxide sputtering target for formation of a protective film for an optical recording medium, a film, which has high storage stability and breakage resistance due to flexibility, can be deposited. Also, it can be utilized for direct-current sputtering and forms a less amount of particles during sputtering. The oxide sputtering target is made of an oxide sintered body including: with respect to a total content amount of metal compositions, 0.15 at % or more of one or more of Al, Ga, and In as a total content amount; 7 at % or more of Sn; and the balance Zn and inevitable impurities, wherein a total content amount of Al, Ga, In, and Sn is 36 at % or less.
Public/Granted literature
- US20150010727A1 OXIDE SPUTTERING TARGET AND PROTECTIVE FILM FOR OPTICAL RECORDING MEDIUM Public/Granted day:2015-01-08
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