Invention Grant
US09123492B2 Three-dimensional inter-chip contact through vertical displacement MEMS
有权
通过垂直位移MEMS三维芯片间接触
- Patent Title: Three-dimensional inter-chip contact through vertical displacement MEMS
- Patent Title (中): 通过垂直位移MEMS三维芯片间接触
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Application No.: US13719366Application Date: 2012-12-19
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Publication No.: US09123492B2Publication Date: 2015-09-01
- Inventor: Kenneth J. Goodnow , Todd E. Leonard , Stephen G. Shuma , Peter A. Twombly
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Riley, LLC
- Agent David A. Cain, Esq.
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40 ; H01L23/02 ; H01H59/00 ; H01L23/528 ; H01L23/538 ; B81B3/00

Abstract:
An electrically conducting, vertically displacing microelectromechanical system (MEMS) is formed on a first integrated circuit chip. The first integrated circuit chip is physically connected to a three-dimensional packaging structure. The three-dimensional packaging structure maintains a fixed distance between the first integrated circuit chip and a second integrated circuit chip. A control circuit is operatively connected to the MEMS. The control circuit directs movement of the MEMS between a first position and a second position. The MEMS makes contact with a contact pad on the second integrated circuit chip when it is in the second position forming a conductive path and providing electrical communication between the first integrated circuit chip and the second integrated circuit chip. The MEMS avoids making contact with the contact pad on the second integrated circuit chip when it is in the first position.
Public/Granted literature
- US20140166461A1 THREE-DIMENSIONAL INTER-CHIP CONTACT THROUGH VERTICAL DISPLACEMENT MEMS Public/Granted day:2014-06-19
Information query
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