Invention Grant
US09123541B2 Highly etch-resistant polymer block for use in block copolymers for directed self-assembly
有权
用于嵌段共聚物的高抗蚀性聚合物嵌段用于定向自组装
- Patent Title: Highly etch-resistant polymer block for use in block copolymers for directed self-assembly
- Patent Title (中): 用于嵌段共聚物的高抗蚀性聚合物嵌段用于定向自组装
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Application No.: US14242551Application Date: 2014-04-01
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Publication No.: US09123541B2Publication Date: 2015-09-01
- Inventor: Kui Xu , Mary Ann Hockey , Douglas Guerrero
- Applicant: Brewer Science Inc.
- Applicant Address: US MO Rolla
- Assignee: Brewer Science Inc.
- Current Assignee: Brewer Science Inc.
- Current Assignee Address: US MO Rolla
- Agency: Hovey Williams LLP
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/308 ; H01L21/033 ; H01L21/311 ; C08L33/12

Abstract:
Compositions for directed self-assembly (DSA) patterning techniques are provided. Methods for directed self-assembly are also provided in which a DSA composition comprising a block copolymer is applied to a substrate and then self-assembled to form the desired pattern. The block copolymer includes at least two blocks of differing etch rates, so that one block (e.g., polymethylmethacrylate) is selectively removed during etching. Because the slower etching block (e.g., polystyrene) is modified with an additive to further slow the etch rate of that block, more of the slow etching block remains behind to fully transfer the pattern to underlying layers.
Public/Granted literature
- US20140299969A1 HIGHLY ETCH-RESISTANT POLYMER BLOCK FOR USE IN BLOCK COPOLYMERS FOR DIRECTED SELF-ASSEMBLY Public/Granted day:2014-10-09
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