Invention Grant
- Patent Title: Method for producing a semiconductor component
- Patent Title (中): 半导体部件的制造方法
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Application No.: US13906425Application Date: 2013-05-31
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Publication No.: US09123559B2Publication Date: 2015-09-01
- Inventor: Andreas Meiser , Markus Zundel
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/06 ; H01L29/423 ; H01L29/66 ; H01L29/78 ; H01L21/28 ; H01L21/762 ; H01L29/40

Abstract:
Methods for producing a semiconductor component that includes a transistor having a cell structure with a number of transistor cells monolithically integrated in a semiconductor body and electrically connected in parallel. In an example method, first trenches extending from the top side into the semiconductor body are produced, as are second trenches that each extend from the top side deeper into the semiconductor body than each of the first trenches. A first dielectric abutting on a first portion of the semiconductor body is produced at a surface of each of the first trenches. Also produced is a second dielectric at a surface of each of the second trenches. In each of the first trenches, a gate electrode is produced, after which a second portion of the semiconductor body is electrically insulated from the first portion of the semiconductor body by removing a bottom layer of the semiconductor body.
Public/Granted literature
- US20140357048A1 Method for Producing a Semiconductor Component Public/Granted day:2014-12-04
Information query
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