Invention Grant
- Patent Title: Pixel structures of CMOS imaging sensors
- Patent Title (中): CMOS成像传感器的像素结构
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Application No.: US14685905Application Date: 2015-04-14
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Publication No.: US09123606B2Publication Date: 2015-09-01
- Inventor: Yan Wei , Hualong Song , Yanchun Ma
- Applicant: Semiconductor Manufacturing International (Beijing) Corporation , Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Beijing CN Shanghai
- Assignee: Semiconductor Manufacturing International (Beijing) Corporation,Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Beijing) Corporation,Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee Address: CN Beijing CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201310461748 20130930
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L29/06 ; H01L29/16 ; H01L31/028

Abstract:
A method is provided for fabricating a pixel structure of a CMOS transistor. The method includes providing a semiconductor substrate doped with first type doping ions; and forming a trench in the semiconductor substrate by etching the semiconductor substrate. The method also includes forming isolation layers on side surfaces of the trench to prevent dark current from laterally transferring; and forming an epitaxial layer doped with second type doping ions with a doping type opposite to a doping type of the first type doping ions in the trench. Further, the method includes forming a pinning layer on a top surface of the epitaxial layer; and forming a gate structure on a surface of the semiconductor substrate at one side of the epitaxial layer. Further, the method also includes forming a floating diffusion region in the semiconductor substrate at one side of the gate structure far from the epitaxial layer.
Public/Granted literature
- US20150221686A1 PIXEL STRUCTURES OF CMOS IMAGING SENSORS Public/Granted day:2015-08-06
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