Invention Grant
- Patent Title: Semiconductor structure and manufacturing method thereof
- Patent Title (中): 半导体结构及其制造方法
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Application No.: US14068528Application Date: 2013-10-31
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Publication No.: US09123612B2Publication Date: 2015-09-01
- Inventor: Jer-Shien Yang , Huei-Ju Yu , I-Ling Kuo , Wen-Lung Ho , Chunyuan Chao
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C.
- Agent Anthony King
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L27/146

Abstract:
A semiconductor structure includes a substrate, an imaging pixel array disposed on a first region of the substrate, a first isolation disposed in the first region, a periphery circuitry disposed on a second region of the substrate, and a second isolation disposed in the second region. The imaging pixel array has a plurality of imaging pixels configured to capture image data. The periphery circuitry has a transistor configured to receive and process the image data. The first isolation has a first depth and a first protrusion projected from a surface of the substrate. The second isolation has a second depth and a second protrusion projected from the surface of the substrate. The first protrusion has a substantially same height as the second protrusion. The first depth is different from the second depth.
Public/Granted literature
- US20150115337A1 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2015-04-30
Information query
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