Invention Grant
- Patent Title: Airgap interconnect with hood layer and method of forming
- Patent Title (中): 气罩与罩层互连和成型方法
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Application No.: US13997171Application Date: 2011-12-29
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Publication No.: US09123727B2Publication Date: 2015-09-01
- Inventor: Kevin Fischer
- Applicant: Kevin Fischer
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- International Application: PCT/US2011/067906 WO 20111229
- International Announcement: WO2013/101096 WO 20130704
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L23/532 ; H01L21/764 ; H01L23/522 ; H01L21/768

Abstract:
An airgap interconnect structure with hood layer and methods for forming such an airgap interconnect structure are disclosed. A substrate having a dielectric layer with a plurality of interconnects formed therein is provided. Each interconnect is encapsulated by a barrier layer. A hardmask is formed on the dielectric layer and patterned to expose the dielectric layer between adjacent interconnects where an airgap is desired. The dielectric layer is etched to form a trench, wherein the etching process additionally etches at least a portion of the barrier layer to expose a portion of the side surface of each adjacent copper interconnect. A hood layer is electrolessly plated onto an exposed portion of the top surface and the exposed portion of the side surface to reseal the interconnect. A gap-sealing dielectric layer is formed over the device, sealing the trench to form an airgap.
Public/Granted literature
- US20140191401A1 AIRGAP INTERCONNECT WITH HOOD LAYER AND METHOD OF FORMIING Public/Granted day:2014-07-10
Information query
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