Invention Grant
- Patent Title: Nonvolatile semiconductor memory device and manufacturing method thereof
- Patent Title (中): 非易失性半导体存储器件及其制造方法
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Application No.: US14195022Application Date: 2014-03-03
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Publication No.: US09123747B2Publication Date: 2015-09-01
- Inventor: Takeshi Sonehara , Takeshi Murata , Junya Fujita , Fumiki Aiso , Saku Hashiura
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Patterson & Sheridan, LLP
- Priority: JP2013-166588 20130809
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L29/66 ; H01L21/28 ; H01L27/115 ; H01L29/51

Abstract:
According to one embodiment, a plurality of memory cell transistors including a floating gate and a control gate and a plurality of peripheral circuit transistors including a lower electrode portion and an upper electrode portion are included. The floating gate includes a first polysilicon region, and the lower electrode includes a second polysilicon region. The first polysilicon region is a p-type semiconductor in which boron is doped, and the second polysilicon region is an n-type semiconductor in which phosphorus and boron are doped.
Public/Granted literature
- US20150041815A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2015-02-12
Information query
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