Invention Grant
- Patent Title: Semiconductor device and production method therefor
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US14291551Application Date: 2014-05-30
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Publication No.: US09123779B2Publication Date: 2015-09-01
- Inventor: Takeshi Morita
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, P.C.
- Priority: JP2013-118146 20130604
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/48 ; H01L21/4763 ; H01L21/768 ; H01L23/522

Abstract:
A semiconductor device having a multi-level interconnection structure including a plurality of interconnection layers stacked one on another on a semiconductor substrate is provided, and a production method for the semiconductor device. In the production method, forming each of the interconnection layers of the multi-level interconnection structure includes: forming a real interconnection and a dummy interconnection, forming an insulative film covering the real interconnection and the dummy interconnection, and planarizing a surface of the insulative film. The production method may include computing an in-plane distribution of an overall thickness of the multi-level interconnection structure to be expected when no dummy interconnection is formed; and defining a dummy present zone and a dummy absent zone. The dummy interconnection is formed in the defined dummy present zone outside the defined dummy absent zone in each of the interconnection layers.
Public/Granted literature
- US20140353845A1 SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR Public/Granted day:2014-12-04
Information query
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