Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US13968687Application Date: 2013-08-16
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Publication No.: US09123803B2Publication Date: 2015-09-01
- Inventor: Shengan Xiao
- Applicant: SHANGHAI HUA HONG NEC ELECTRONICS CO., LTD.
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI HUA HONG NEC ELECTRONICS CO., LTD.
- Current Assignee: SHANGHAI HUA HONG NEC ELECTRONICS CO., LTD.
- Current Assignee Address: CN Shanghai
- Agency: MKG LLC
- Priority: CN201210295845 20120817
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L29/78 ; H01L29/66 ; H01L29/417 ; H01L29/40 ; H01L29/45 ; H01L29/49

Abstract:
A semiconductor device includes: a P+ substrate; a P− epitaxial layer over the P+ substrate; a P-well and an N− drift region in the P− epitaxial layer and laterally adjacent to each other; an N+ source region in the P-well and connected to a front-side metal via a first contact electrode; an N+ drain region in the N− drift region and connected to the front-side metal via a second contact electrode; a gate structure on the P− epitaxial layer and connected to the front-side metal via a third contact electrode; and a metal plug through the P− epitaxial layer and having one end in contact with the P+ substrate and the other end connected to the front-side metal, the metal plug being adjacent to one side of the N+ source region that is farther from the N− drift region. A method for fabricating the semiconductor device is also disclosed.
Public/Granted literature
- US20140048878A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2014-02-20
Information query
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