Invention Grant
- Patent Title: Semiconductor device having a triple gate transistor and method for manufacturing the same
- Patent Title (中): 具有三栅极晶体管的半导体器件及其制造方法
-
Application No.: US13417706Application Date: 2012-03-12
-
Publication No.: US09123811B2Publication Date: 2015-09-01
- Inventor: Shigenobu Maeda , Jeong Hwan Yang , Junga Choi
- Applicant: Shigenobu Maeda , Jeong Hwan Yang , Junga Choi
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Onello & Mello, LLP
- Priority: KR04-11328 20040220
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/04 ; H01L29/78 ; H01L29/66

Abstract:
In a semiconductor capable of reducing NBTI and a method for manufacturing the same, a multi-gate transistor includes an active region, gate dielectric, channels in the active region, and gate electrodes, and is formed on a semiconductor wafer. The active region has a top and side surfaces, and is oriented in a first direction. The gate dielectric is formed on the top and side surfaces of the active region. The channels are formed in the top and side surfaces of the active region. The gate electrodes are formed on the gate dielectric corresponding to the channels and aligned perpendicular to the active region such that current flows in the first direction. In one aspect of the invention, an SOI layer having a second orientation indicator in a second direction is formed on a supporting substrate having a first orientation indicator in a first direction.
Public/Granted literature
- US20120168827A1 SEMICONDUCTOR DEVICE HAVING A TRIPLE GATE TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-07-05
Information query
IPC分类: