Invention Grant
- Patent Title: Semiconductor device and fabrication method
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US14069693Application Date: 2013-11-01
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Publication No.: US09123812B2Publication Date: 2015-09-01
- Inventor: Qiuhua Han
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201310011741 20130111
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/10

Abstract:
Semiconductor devices and fabrication methods are provided. In an exemplary method, a semiconductor layer including a first opening can be provided. The first opening can be filled with a stress material. The stress material can then be etched to form a second opening having a width less than a width of the first opening to leave a stress material layer in the semiconductor layer and on each sidewall of the second opening. The semiconductor layer can be etched to form a fin structure on a sidewall surface of the stress material layer. A main gate structure can be formed on the sidewall surface of the fin structure. A back gate structure can be formed on the sidewall surface of the stress material layer.
Public/Granted literature
- US20140197492A1 SEMICONDUCTOR DEVICE AND FABRICATION METHOD Public/Granted day:2014-07-17
Information query
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