Invention Grant
- Patent Title: Field effect device provided with a thinned counter-electrode and method for fabricating
- Patent Title (中): 具有减薄的对电极的场效应器件和制造方法
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Application No.: US13352784Application Date: 2012-01-18
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Publication No.: US09123814B2Publication Date: 2015-09-01
- Inventor: Laurent Grenouillet , Maud Vinet
- Applicant: Laurent Grenouillet , Maud Vinet
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oliff PLC
- Priority: FR1100200 20110124
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L21/265 ; H01L29/66

Abstract:
A field effect device comprises a substrate of semiconductor on insulator type successively provided with a support substrate, an electrically insulating layer and a semiconductor material film. First and second source/drain electrodes are formed in the semiconductor material layer. A conduction channel is formed in the semiconductor material layer and separates the first and second source/drain electrodes. A counter-electrode is formed in the support substrate and faces the first and second source/drain electrodes and the conduction channel. The counter-electrode is formed by a doped area of the support substrate having a first doping impurity concentration which decreases from an interface between the electrically insulating layer and the support substrate.
Public/Granted literature
- US20120187488A1 FIELD EFFECT DEVICE PROVIDED WITH A THINNED COUNTER-ELECTRODE AND METHOD FOR FABRICATING Public/Granted day:2012-07-26
Information query
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