Invention Grant
- Patent Title: VTFTs including offset electrodes
- Patent Title (中): VTFT包括偏移电极
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Application No.: US14198623Application Date: 2014-03-06
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Publication No.: US09123815B1Publication Date: 2015-09-01
- Inventor: Shelby Forrester Nelson , Carolyn Rae Ellinger
- Applicant: Shelby Forrester Nelson , Carolyn Rae Ellinger
- Applicant Address: US NY Rochester
- Assignee: EASTMAN KODAK COMPANY
- Current Assignee: EASTMAN KODAK COMPANY
- Current Assignee Address: US NY Rochester
- Agent William R. Zimmerli
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/786 ; H01L27/12

Abstract:
A device with multiple vertical transistors includes a substrate and an electrically conductive gate structure including first and second edges opposite each other and including first and second reentrant profiles, respectively. A conformal electrically insulating layer maintains the reentrant profiles and is in contact with the gate. A conformal semiconductor layer maintains the reentrant profiles and is in contact with the insulating layer. First and second electrodes are in contact with first and second portions of the semiconductor and adjacent to the first and second reentrant profiles, respectively. A third electrode is in contact with a third portion of the semiconductor on a top of the gate structure. The first and third electrodes and the second and third electrodes define ends of first and second channels of first and second transistors, respectively. First and second lines, extending between the ends of the first and second channels, are not parallel.
Public/Granted literature
- US20150255620A1 VTFTS INCLUDING OFFSET ELECTRODES Public/Granted day:2015-09-10
Information query
IPC分类: