The embodiments of the disclosed technology provide a liquid crystal display, a thin film transistor array substrate and a method for manufacturing thin film transistor array substrate. The TFT array substrate comprises: a semiconductor layer, a source electrode and a drain electrode formed adjoining the semiconductor layer, a thin film transistor channel region being defined between the source electrode and the drain electrode; and an ohmic contact layer formed between the semiconductor layer and the drain electrode and between the semiconductor layer and the source electrode, wherein the material of the semiconductor layer is zinc oxide (ZnO) and the material of the ohmic contact layer is GaxZn1-xO, where 0≦x≦1.