Invention Grant
- Patent Title: Vibration device
- Patent Title (中): 振动装置
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Application No.: US13849952Application Date: 2013-03-25
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Publication No.: US09123883B2Publication Date: 2015-09-01
- Inventor: Hideaki Kurita
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2012-069221 20120326
- Main IPC: H01L41/053
- IPC: H01L41/053 ; G01C19/5621

Abstract:
A vibration device includes a semiconductor device, a first electrode and a second electrode located in a first surface of the semiconductor device, a vibration element, a third electrode and a fourth electrode located in a first surface of the vibration element, a first connection section that connects the first electrode and the third electrode, and a second connection section that connects the second electrode and the fourth electrode. The semiconductor device and the vibration element have mutually different thermal expansion coefficients. The vibration element has a coupling section located between the third electrode and the fourth electrode, and the coupling section has at least one bend section located between the third electrode and the fourth electrode.
Public/Granted literature
- US20130249351A1 VIBRATION DEVICE Public/Granted day:2013-09-26
Information query
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