Invention Grant
- Patent Title: Showerhead
- Patent Title (中): 淋浴头
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Application No.: US13920744Application Date: 2013-06-18
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Publication No.: US09126214B2Publication Date: 2015-09-08
- Inventor: Chien-Ping Huang , Tsan-Hua Huang
- Applicant: HERMES-EPITEK CORPORATION
- Applicant Address: TW Taipei
- Assignee: Hermes-Epitek Corporation
- Current Assignee: Hermes-Epitek Corporation
- Current Assignee Address: TW Taipei
- Agency: Stout, Uxa & Buyan, LLP
- Agent Donald E. Stout
- Priority: TW99102945A 20100202
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/465 ; B05B1/14 ; B23P15/16 ; B05B1/18 ; H01L21/46 ; H01L21/4757

Abstract:
A showerhead is disclosed in this invention. The showerhead includes a bottom portion, at least one plate, and a top portion. The bottom portion includes a plurality of gas tubes which are integratedly formed on the bottom portion. The gas tubes include at least one first gas tube. The at least one plate includes a first plate. The first plate includes a plurality of first openings, wherein the gas tubes pass through the first openings. The top portion is coupled to the bottom portion for forming at least one inner space.
Public/Granted literature
- US20130277459A1 Showerhead Public/Granted day:2013-10-24
Information query
IPC分类: