Invention Grant
- Patent Title: Method for cleaning bell jar, method for producing polycrystalline silicon, and apparatus for drying bell jar
- Patent Title (中): 钟罩的清洗方法,多晶硅的制造方法以及钟罩的干燥装置
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Application No.: US13704767Application Date: 2011-03-07
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Publication No.: US09126242B2Publication Date: 2015-09-08
- Inventor: Yasushi Kurosawa , Kyoji Oguro , Shinichi Kurotani , Shigeyoshi Netsu
- Applicant: Yasushi Kurosawa , Kyoji Oguro , Shinichi Kurotani , Shigeyoshi Netsu
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-137646 20100616
- International Application: PCT/JP2011/001319 WO 20110307
- International Announcement: WO2011/158404 WO 20111222
- Main IPC: C01B33/035
- IPC: C01B33/035 ; B08B3/04 ; B08B9/08 ; B08B3/10 ; F28G13/00 ; F26B5/12

Abstract:
A bell jar includes a metallic bell jar (1), and a metallic base plate (2) on which the bell jar (1) is placed, and packing (3) seals an inside of a container. To the base plate (2), a pressure gauge (4), a gas introduction line (5), and a gas discharge line (6) are connected so as to allow monitoring of internal pressure of the bell jar (1) and introduction and discharge of a gas. A vacuum pump (7) is provided in a path of the gas discharge line (6), and the vacuum pump (7) reduces internal pressure of the bell jar so as to be lower than vapor pressure of water. The vacuum pump (7) reduces the internal pressure of the bell jar so as to be lower than vapor pressure of water, thereby efficiently removing moisture, and completing drying of the bell jar in a short time.
Public/Granted literature
Information query
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