Invention Grant
- Patent Title: Polishing pad
- Patent Title (中): 抛光垫
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Application No.: US13639475Application Date: 2011-04-07
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Publication No.: US09126304B2Publication Date: 2015-09-08
- Inventor: Tsuyoshi Kimura
- Applicant: Tsuyoshi Kimura
- Applicant Address: JP Osaka
- Assignee: TOYO TIRE & RUBBER CO., LTD.
- Current Assignee: TOYO TIRE & RUBBER CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Law Office of Katsuhiro Arai
- Priority: JP2010-094318 20100415
- International Application: PCT/JP2011/058778 WO 20110407
- International Announcement: WO2011/129254 WO 20111020
- Main IPC: B24B37/20
- IPC: B24B37/20 ; B24B37/22

Abstract:
An object of the present invention is to provide a polishing pad which enables high accuracy optical end-point detection in a state where polishing is carrying out, and which can prevent slurry leakage from a polishing layer to a cushion layer even in the case of being used for a long period. Another object is to provide a method for producing a semiconductor device using the polishing pad. The present invention relates to a polishing pad in which a polishing layer having a polishing region and a light-transmitting region, and a cushion layer having a through hole are laminated via a double-sided adhesive sheet such that the light-transmitting region and the through hole are laid one upon another, wherein a transparent member is stuck on an adhesive layer of the double-sided adhesive sheet in the through hole.
Public/Granted literature
- US20130017769A1 POLISHING PAD Public/Granted day:2013-01-17
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