Invention Grant
US09126823B2 Microphone 有权
麦克风

Microphone
Abstract:
A microphone has a base substrate comprising a main surface, an acoustic sensor mounted on the main surface, and a circuit element stacked on the acoustic sensor. A hollow space is formed between the acoustic sensor and the circuit element. The acoustic sensor has a sensor substrate having a first surface opposed to the base substrate, a second surface on a side opposite to the first surface, and a cavity formed while recessed with respect to the second surface, and a movable electrode that covers the cavity from the second surface side. A through-hole is formed in the base substrate while piercing the base substrate in a thickness direction. A communication hole is formed in the sensor substrate while piercing the sensor substrate from the first surface to the second surface. The communication hole causes the through-hole and the hollow space to communicate with each other.
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