Invention Grant
- Patent Title: Microphone
- Patent Title (中): 麦克风
-
Application No.: US14224238Application Date: 2014-03-25
-
Publication No.: US09126823B2Publication Date: 2015-09-08
- Inventor: Masaaki Kasai
- Applicant: OMRON Corporation
- Applicant Address: JP Kyoto
- Assignee: OMRON Corporation
- Current Assignee: OMRON Corporation
- Current Assignee Address: JP Kyoto
- Agency: Osha Liang LLP
- Priority: JP2013-083470 20130412
- Main IPC: B81B3/00
- IPC: B81B3/00

Abstract:
A microphone has a base substrate comprising a main surface, an acoustic sensor mounted on the main surface, and a circuit element stacked on the acoustic sensor. A hollow space is formed between the acoustic sensor and the circuit element. The acoustic sensor has a sensor substrate having a first surface opposed to the base substrate, a second surface on a side opposite to the first surface, and a cavity formed while recessed with respect to the second surface, and a movable electrode that covers the cavity from the second surface side. A through-hole is formed in the base substrate while piercing the base substrate in a thickness direction. A communication hole is formed in the sensor substrate while piercing the sensor substrate from the first surface to the second surface. The communication hole causes the through-hole and the hollow space to communicate with each other.
Public/Granted literature
- US20140306299A1 MICROPHONE Public/Granted day:2014-10-16
Information query