Invention Grant
- Patent Title: Electrical component and method of manufacturing the same
- Patent Title (中): 电气元件及其制造方法
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Application No.: US13962885Application Date: 2013-08-08
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Publication No.: US09126824B2Publication Date: 2015-09-08
- Inventor: Tomohiro Saito
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz, Goodman & Chick PC
- Priority: JP2013-027926 20130215
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B7/00 ; B81C1/00

Abstract:
According to one embodiment, an electrical component comprises a substrate, a functional element formed on the substrate, a first layer configured to form a cavity which stores the functional element on the substrate, the first layer having through holes, the first layer having a first recessed portion and a first projecting portion on an upper surface thereof, and the first layer having different film thicknesses in a direction perpendicular to a surface of the substrate, and a second layer formed on the first layer and configured to close the through holes.
Public/Granted literature
- US20140231934A1 ELECTRICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2014-08-21
Information query
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