Invention Grant
US09126849B2 Container containing a cobalt carbonyl complex and cobalt carbonyl complex composition
有权
含有羰基钴络合物和羰基钴复合物组合物的容器
- Patent Title: Container containing a cobalt carbonyl complex and cobalt carbonyl complex composition
- Patent Title (中): 含有羰基钴络合物和羰基钴复合物组合物的容器
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Application No.: US14531152Application Date: 2014-11-03
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Publication No.: US09126849B2Publication Date: 2015-09-08
- Inventor: Hideki Nishimura , Kouji Sumiya , Yasuo Matsuki
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-303678 20081128; JP2008-303679 20081128
- Main IPC: C07F15/00
- IPC: C07F15/00 ; C01G51/02 ; C23C16/16 ; C23C16/448 ; H01L21/285 ; H01L21/768

Abstract:
A container containing a cobalt carbonyl complex and a gas that contains carbon monoxide, and a cobalt carbonyl complex composition comprising a cobalt carbonyl complex and a solvent, wherein the concentration of carbon monoxide dissolved in the solvent is 0.001 to 1 wt %.Since the cobalt carbonyl complex contained in the above container or the above composition can retain its sublimation properties for a long time without being converted into a stable complex, when a cobalt film is formed by chemical vapor deposition using the container and the composition, a high-quality film can be formed by a simple process, and the production cost of the cobalt film can be reduced due to high use efficiency of the precursor.
Public/Granted literature
- US20150050205A1 CONTAINER CONTAINING A COBALT CARBONYL COMPLEX AND COBALT CARBONYL COMPLEX COMPOSITION Public/Granted day:2015-02-19
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