Invention Grant
- Patent Title: Method and apparatus for depositing mixed layers
- Patent Title (中): 用于沉积混合层的方法和装置
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Application No.: US12342969Application Date: 2008-12-23
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Publication No.: US09127349B2Publication Date: 2015-09-08
- Inventor: Juergen Bruch , Elisabeth Sommer , Uwe Hoffmann , Manuel Dieguez-Campo
- Applicant: Juergen Bruch , Elisabeth Sommer , Uwe Hoffmann , Manuel Dieguez-Campo
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: C30B23/02
- IPC: C30B23/02 ; C23C14/24 ; C23C14/12 ; C23C14/22 ; H01L51/00 ; H01L51/56
Abstract:
The present invention refers to a method as well as an apparatus for depositing a layer at a substrate, the layer containing at least two components co-deposited by at least two evaporation sources, wherein the mixture of the components regarding the content of the components is set by tilting the evaporation sources to predetermined angle and/or by positioning the evaporation sources at a predetermined distance with respect to the substrate and/or wherein evaporation plumes of the evaporation sources are arranged such that the maxima of the evaporation plumes are separated locally with respect to the substrate.
Public/Granted literature
- US20100159125A1 METHOD AND APPARATUS FOR DEPOSITING MIXED LAYERS Public/Granted day:2010-06-24
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