Invention Grant
- Patent Title: Film-Forming apparatus and Film-Forming method
- Patent Title (中): 成膜装置和成膜方法
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Application No.: US13359802Application Date: 2012-01-27
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Publication No.: US09127353B2Publication Date: 2015-09-08
- Inventor: Seiken Matsumoto , Seiji Kuwabara
- Applicant: Seiken Matsumoto , Seiji Kuwabara
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2011-021465 20110203; JP2012-013169 20120125
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/35 ; H01J37/34

Abstract:
Provided are a film-forming apparatus and a film-forming method capable of preventing complication of an apparatus mechanism in formation of a thin film of multiple materials by sputtering to simplify the apparatus mechanism and preventing an increase in an apparatus cost. The film-forming apparatus includes a vacuum chamber, a substrate holder for holding a substrate, cathode mechanisms for supporting targets respectively so that the targets can be opposed to the substrate in the vacuum chamber, and shutters movable forward and backward individually between the targets made of different materials and the substrate to block or pass film-forming particles generated from the targets. At least one of the shutters is formed of a target material different from those for the targets so that the at least one of the shutters is configured as a shutter that also functions as a target.
Public/Granted literature
- US20120199471A1 FILM-FORMING APPARATUS AND FILM-FORMING METHOD Public/Granted day:2012-08-09
Information query
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