Invention Grant
US09127365B2 Generation of multilayer structures in a single sputtering module of a multi-station magnetic recording media fabrication tool 有权
在多台磁记录介质制造工具的单个溅射模块中生成多层结构

Generation of multilayer structures in a single sputtering module of a multi-station magnetic recording media fabrication tool
Abstract:
Methods of fabricating perpendicular magnetic recording media are disclosed. The multilayer structures of the perpendicular magnetic recording media are fabricated by varying the sputtering conditions (i.e., pressure, sputtering gas, etc) in a single sputtering module so that multiple sputtering modules are not needed to form the multilayer structures. These fabrication methods allow sputtering tools with a limited number of chambers, which were designed for the manufacture of longitudinal media, to be used to efficiently produce perpendicular media architectures which heretofore required a large number of sputtering modules. It is further shown that media structures involving a geometric weak-link architecture are suited for these fabrication techniques.
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